Kwinkqubo yokuSuswa koMphunga kwiPlasma ukuya kwiChemical Vapor Deposition (PECVD), lonke uqhagamshelo lombane, ukusuka ekudlulisweni kwamandla e-RF ukuya kulawulo lwegesi yenkqubo, luchaphazela ngokuthe ngqo ukufana kokubekwa kwefilimu encinci kunye nokuveliswa kweetships. Ukujongana nemeko enzima yezixhobo ezincinci, i-vacuum ephezulu, kunye nokuphazamiseka okunamandla kwe-electromagnetic,IWAGOIzihlanganisi ze-picoMAX®, ezineenzuzo ezintathu eziphambili "zokuqina, ukuthembeka, kunye nokusebenza kakuhle," ziye zaba sisisombululo soqhagamshelo esifanelekileyo kwiinkqubo ze-PECVD.
Uyilo oluNcinci oluNtsha
Ukuziqhelanisa neZimo zeChamber eziBalaseleyo
Indawo yangaphakathi yezixhobo zePECVD incinci, ifuna ulungelelwaniso oluxineneyo lwamandla, isignali, kunye nemigca yokuva ejikeleze igumbi lokusabela. I-picoMAX® isebenzisa uyilo lwe-single-spring, olusebenza kabini, oluneephini ezininzi ze-3.5/5.0/7.5mm ezikhoyo. Emva kokudibana, ithatha indawo engaphantsi ngama-30% kuneemveliso zangaphambili, ilungelelanisa ngokugqibeleleyo neemfuno zocingo ezijikeleze igumbi. Isixhumi sayo sohlobo lwemingxuma siphantse safakwa ngokupheleleyo kwi-pin header, sixhasa ukuhlanganiswa ecaleni ngaphandle kokulahlekelwa ziipali, siphucula kakhulu ukusetyenziswa kwebhodi yesekethe kwaye sivumela ulungelelwaniso olucwangcisiweyo lwesignali kunye nemigca yombane ngaphandle kokuphazamisana nentsimi yokuhamba kwegesi kwinkqubo.
Ukhuseleko Oluqinileyo Kwiimeko Ezinzima Zokusebenza
Iinkqubo zePECVD zibandakanya i-vacuum ephezulu, i-plasma ephezulu, kunye neendawo zokungcangcazela, zibeka iimfuno ezingqongqo kukuthembeka kwesixhumi. I-picoMAX® inesakhiwo esizinzileyo esinokuxhathisa ukungcangcazela ukuya kuthi ga kwi-12g, ithintela ukukhululeka koqhagamshelwano okubangelwa kukungcangcazela okuphezulu. Ikwabandakanya uyilo oluchasene nokungafakwa kakuhle kunye nesixhobo sokutshixa, isusa iimpazamo zokufakela kwaye ithintele ukuqhawuka ngengozi, iqinisekisa ukusebenza kwezixhobo okuqhubekayo ngaphandle kwexesha lokungasebenzi.
Uqhagamshelo oluKhawulezayo olungenaZixhobo
I-picoMAX® inetekhnoloji yokudibanisa ngokukhawuleza engenazixhobo, evumela uqhagamshelo "lweplagi-and-hold" kuzo zombini iingcingo ezinemicu enye kunye neengcingo ezininzi ezinezihlanganisi ezicinezelwe ngokubandayo. Uqhagamshelo lweengcingo ezintsonkothileyo lugqitywa ngenyathelo elinye, luphucula kakhulu ukusebenza kakuhle kwendibano kwaye lunciphisa imijikelo yokulungisa iimpazamo. Uyilo lwemodyuli luyahambelana neenkqubo zokudibanisa kwakhona, luhlangabezana neemfuno zokunciphisa iindleko zemveliso ezenzekelayo. Ikwagubungela zonke iimeko zoqhagamshelo lwePECVD: Iphitshi yephini ye-3.5mm ithwala iingcingo zesignali ze-0.2-1.5mm², ngelixa iphitshi yephini ye-5.0/7.5mm ixhasa imigca yamandla ye-16A. Ixhasa iindlela zokufakela i-wire-to-board kunye neendlela zokufaka udonga, iyahambelana nekhabhinethi yokulawula kunye neengcingo ze-cavity, kwaye iyahambelana nemigangatho yokhuseleko lombane ye-GB/T 5226.1, yakha ukhuselo oluqinileyo lokuzinza kwenkqubo.
Kwishishini le-semiconductor, apho ukuchaneka kwenkqubo kwinqanaba le-nanometer kubaluleke kakhulu, uqhagamshelo oluthembekileyo luyisiqinisekiso semveliso ephezulu.IWAGOI-picoMAX®, ngengcamango yayo yoyilo lwemveliso eguqukayo, ifezekisa "ubungakanani obuncinci, ukusebenza okuphezulu" ngaphakathi komgangatho omncinci, ibonelela ngezisombululo zoqhagamshelo ezizinzileyo, ezisebenzayo, nezihlala ixesha elide kwizixhobo zePECVD. Oku kunceda abavelisi be-semiconductor ukuba boyise imingeni yoqhagamshelo lwenkqubo yokuchaneka, ikhusela ukuchaneka kwenqanaba le-micrometer yetshiphusi nganye.
Ixesha lokuthumela: Matshi-13-2026